Micro Gas Mass Flow Meter, 100-5000sccm/1-100SLPM

$788.88

The micro gas mass flow meter tests air, CO₂, N₂, O₂, and Ar. With options for RS485 communication or analog voltage output ranging from 0.5 to 4.5V DC. It offers a 50:1 range ratio and delivers high accuracy with a measurement tolerance of ±(2.0 + 0.5 FS), achieving a 0.8% accuracy overall. The meter has repeatability at 0.80% and zero stability of ±0.1% FS. Its output drift is minimal, at ±0.12%/℃.

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Output Signal *
Gas *

SKU: ATO-FLOW-MFM

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Delivery date: 6-12 days

Overview
Documents

The micro gas mass flow meter is designed for testing gases like air, CO2, N2, O2, and Ar. It offers RS485 communication or analog voltage output (0.5-4.5V DC). With a 50:1 range ratio, it provides ±(2.0 + 0.5 FS) accuracy (0.8%) and 0.80% repeatability. The meter also features zero stability of ±0.1% FS and minimal output drift of ±0.12%/℃.

Specification

Model Selection

Model	Mechanical Connection	Max Flow Rate
ATO-MF4701	N1-NPT 1/8" internal thread	100, 200, 500 sccm
ATO-MF4703	N1-NPT 1/8" internal thread	1, 2, 5 SLPM or 1000, 2000, 5000 sccm
ATO-MF4708	N3-NPT 3/8" internal thread	10, 20, 50 SLPM
ATO-MF4710	G4-G1/2" internal thread	100 SLPM

Please contact us if you need other specifications.

Technical Parameters

Gas Medium	Air/CO2/N2/O2/Ar (optional)
Range Ratio	50:1
Accuracy	±(2.0 + 0.5 FS) 0.8%
Repeatability	0.80%
Zero Stability	±0.1% FS
Output Drift	±0.12%/℃
Corresponding Time	10 (Default, can be set to 20, 50, 100, 500, 1000)
Power Supply	8~24V DC, 50mA
Output Method	Linearity: RS485/Analog voltage output (0.5~4.5V DC)
Display	4-digit 7-segment LED display, 2 indicators
Instantaneous Flow Unit	sccm or SLPM
Cumulative Flow Unit	sccm corresponds to scc or SL, SLPM corresponds to SL or Nm³
Instantaneous Flow Resolution	100, 200, 500 sccm: 0.1 or 1 sccm (default: 1 sccm)
	1000, 2000, 5000 sccm: 1 sccm
	1, 2, 5 SLPM: 0.001, 0.01, 0.1, or 1 SLPM (default: 0.01 SLPM)
	10, 20, 50 SLPM: 0.01, 0.1 or 1 SLPM (default: 0.1 SLPM)
	100, 200 SLPM: 0.1 or 1 SLPM (default: 1 SLPM)
Cumulative Flow Resolution	Maximum Flow 100~5000 sccm: 0.1 sccm or 0.01 SL
Cumulative Flow Resolution	Maximum Flow 1~1000 SLPM: 0.1 SL or 0.01 Nm³
Cumulative Flow Maximum	Maximum Flow 100~5000 sccm: 9999999.9 scc or 999999.99 SL
Cumulative Flow Maximum	Maximum Flow 1~1000 SLPM: 9999999.9 SL or 999999.99 Nm3
Maximum Working Pressure	≤1.0 MPa
Environmental Temperature	Operating: -10~+55°C; Storage: -20~+65°C
Humidity	≤ 95% RH (No freezing, no condensation)
Mechanical Interface	NPT or BSPT internal thread
Keyboard	Three buttons
Electrical Interface	CDR-5
Standard Calibration Gas	Air (20°C, 101.325 kPa)

Feature

High Accuracy: Thermal mass flow sensing ensures precise measurements without needing temperature or pressure compensation.
Wide Flow Range: Offers a 50:1 flow range, from 100 sccm to 5000 sccm (1 SLPM to 100 SLPM).
Multi-Sensor Integration: Combines multiple sensors in a single chip for improved performance and compact design.
Flexible Outputs: Provides digital communication or linear analog voltage output, and can be queried by a host computer.
Real-Time Display: LED display shows instantaneous flow and total accumulated flow.
Flow Recordings: Records maximum and minimum flow values since power-on.
Over-range Alert: Alerts when the flow exceeds the meter’s capacity.
RS485 Communication: Includes an RS485 module for remote control and data transfer.
Standard Gas Path Interface: Uses standard gas connectors, compatible with traditional flow meters.
Customizable Dimensions: Custom mechanical sizes and flow ranges available based on customer needs.

Detail

Dimension (Unit: mm)

Micro gas mass flow mete size

Model	L	B	H1	H2	H3	H4	2-N
ATO-MF4701/ATO-MF4703	98	24	43	29	20	10	2-NPT 1/8
ATO-MF4708	98	24	47	33	24	12	2-NPT 3/8
ATO-MF4710	118	30	53	39	30	15	2-G 1/2

Tips: How does the meter compare to traditional flow meters?

Compared to traditional mechanical flow meters, such as rotameters or turbine meters, the Micro Gas Mass Flow Meter offers several advantages. First, it provides much higher accuracy and repeatability, particularly at low flow rates. Traditional flow meters often require calibration for each specific gas type, whereas the Micro Gas Mass Flow Meter can measure a wide range of gases without the need for such adjustments. Additionally, the thermal mass flow technology used in this meter does not require temperature or pressure compensation, which simplifies operation and reduces the need for complex calibration procedures. The meter’s digital and analog outputs also offer more flexibility in integration with modern control systems.

Micro Gas Mass Flow Meter User Manual.pdf

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